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Axcelis Technologies and GE Aerospace have announced a Joint Development Program to develop production-worthy 6.5 to 10kV superjunction power devices on Axcelis' Purion XEmax high energy implanter. The program supports GE Aerospace's "Advanced High Voltage Silicon Carbide Switches" project and aims to improve the performance of power switches in emerging applications. Axcelis' Purion XEmax provides maximum flexibility in energy ranges, optimizing profile in depth and concentration, and reducing the number of application steps.

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