ESOL Wins Deal to Supply EUV Mask Inspection Kit to Japanese Giant, Beats Zeiss and US Rival

ESOL, a South Korean fab equipment maker and subsidiary of FST, has won a deal to supply an EUV mask inspection kit to Japan's largest photomask maker, beating out Germany's Zeiss. The deal is worth tens of millions of dollars and will supply a flex ray EUV microscope to inspect masks for use in Rapidus' 2-nanometer node. ESOL's FREM replicates the optical condition of EUV lithography machines and looks for micro-defects on EUV photomasks.